The fabrication process of color filters produced with a series of new
pigmented photoresists (CX513RGB) and their performance are described
. The novel resist materials offer excellent contrast, good film unifo
rmity and a stable shelf life exceeding 6 months, which was achieved b
y optimization of the amount and the molecular weight of a proprietary
pigment dispersant. The development conditions of the pigmented resis
ts were found to be influenced by their adhesion to the substrate mate
rials (glass, chromium oxide and pixels). Dissolution type development
was observed for prebake temperatures below 135 degrees C or when dev
elopers with higher tetramethyl ammonium hydroxide (TMAH) concentratio
ns were used. The desired overcut pattern profiles were obtained when
development limes ranged from 60-180s. CX513RGB resists obey the ''rec
iprocity law'' over 3 mW/cm(2) and thus the resist sensitivity is not
affected by the irradiation power generated by conventional mask align
ers (15-20 mW/cm(2)).