Hh. Brongersma et al., A ROUND-ROBIN EXPERIMENT OF ELEMENTAL SENSITIVITY FACTORS IN LOW-ENERGY ION-SCATTERING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 142(3), 1998, pp. 377-386
In a round robin experiment a set of five polycrystalline, metallic sa
mples is studied by low-energy ion scattering (LEIS) in five different
laboratories, The energy range is 0.6-3.5 keV and He and Ne ions are
used. Even though different experimental setups are used the evaluated
elemental sensitivity factors agree within +/-20%. Reproducibility wi
thin single laboratories is better than 10%. In an additional study ca
rried out in three laboratories the surface composition of an alloy, C
u55Pd45, was determined, using in situ calibration standards, These su
rface composition measurements agreed within +/-3 at% demonstrating th
at quantitative composition determination is possible using this proce
dure. (C) 1998 Elsevier Science B.V. All rights reserved.