ION SOURCES FOR MICROSIZE ION-BEAM TREATMENT OF OPTICAL PARTS

The requirements of ion sources (IS) for ion-beam treatment (IBT) of h igh precision optical parts are substantiated. The ion source feature is presented. There are developed and investigated differences for ion -optical systems forming the beams featuring preset ion current distri bution and cross section (on the 0.1 level) in the range from 5 to 30 mm. The ion beam characteristics are measured. IS has been tested whil e processing different materials. The source is recommended for employ ment in installations designed for automatic microsize processing of h igh precision optical parts. (C) 1998 American Institute of Physics.