ANALYTICAL AND EXPERIMENTAL MODAL-ANALYSIS FOR OPERATIONAL VALIDATIONAND CALIBRATION OF A MINIATURE SILICON SENSOR

The development of micromechanical sensors poses new challenges in des ign, calibration and operation. The paper reports a study where analyt ical and experimental techniques are applied to a prototype sensor. An alytically, a substructuring method is used together with a proprietar y finite element package. Experimentally, novel excitation and respons e transducers are used to provide input data for specialised time doma in identification algorithms. The resulting comparisons provide confid ence in the combination of techniques used in the study.