SURFACE MICROSTRUCTURE MINIATURE MASS-SPECTROMETER - PROCESSING AND APPLICATIONS

Authors
SIEBERT P PETZOLD G HELLENBART A MULLER J
Citation
P. Siebert et al., SURFACE MICROSTRUCTURE MINIATURE MASS-SPECTROMETER - PROCESSING AND APPLICATIONS, Applied physics A: Materials science & processing, 67(2), 1998, pp. 155-160
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
67
Issue
2
Year of publication
1998
Pages
155 - 160
Database
ISI
SICI code
0947-8396(1998)67:2<155:SMMM-P>2.0.ZU;2-W
Abstract
This paper presents the concept and the processing of a miniaturised m ass spectrometer, with dimensions of approximately only a few cm(3). I ts fabrication is based on techniques used in microsystem processing a nd in particular anisotropic etching, thin film deposition, electropla ting, and anodic bonding. The mass spectrometer consists of a plasma e lectron source for measurand ionisation as well as an ion optic and a mass separator specifically designed for the system's small dimensions .