The effect on the growth morphology of changing methane concentration
and substrate temperature has been studied in a hot filament chemical
vapor deposition reactor. Methane concentration and substrate temperat
ures were varied from 0.5 to 1.5% and 536 to 1140 degrees C, respectiv
ely. The morphology produced has been quantified as the ratio of the r
ate of growth in the [100] and [111] crystallographic directions, and
the dependence of this ratio on growth parameters has been used to pro
duce a morphology map for the hot filament system. The morphology map
generated shows trends similar to those observed for microwave plasma
depositions. In addition, the apparent growth rates in the [100] and [
111] crystallographic directions have been determined in the region of
1 < alpha < 3. The growth rate in the [100] direction exhibits a shar
p drop at temperatures where the crystal geometry is changing from oct
ahedral to cube-octahedral, whereas the growth rate in the [111] direc
tion exhibits a more gradual change with temperature. These effects ar
e attributed to the temperature dependence of surface diffusion. (C) 1
998 Elsevier Science S.A.