ENERGIES OF CARBON PLASMA BEAMS IN THE DEPOSITION OF DIAMOND-LIKE COATINGS WITH THE PULSED-ARC-DISCHARGE METHOD

The carbon plasma ion energies produced by the pulsed filtered are-dis charge method have been measured as a function of the anode-cathode vo ltage. The energies were determined by using the electro-optical time- of-flight method. The highest anode-cathode voltage was 4 kV and yield ed the energy of 140 eV for the plasma ions. In addition, it was demon strated that a rather slight change of the parameters in the arc-disch arge method has a strong effect on the plasma ion energies and the pro perties of the diamond-like coatings prepared.