SCANNING PROBE MICROSCOPY OF VACUUM-ARC-DEPOSITED METALLIC AND DIAMOND-LIKE CARBON THIN-FILMS

We report on some scanning probe microscopy observations of the morpho logy of both metallic and diamond-like carbon thin films formed using a vacuum are plasma deposition method with ion energy control. The met al films investigated were Cu, Mo, Ta and W, and the diamond-like carb on films were hydrogen-free and with sp(3):sp(2) fraction (i.e. diamon d content) up to as high as 85%; film thicknesses were 300-2000 Angstr om. The microscopy was done using both atomic force and scanning tunne ling modes. We found that all of the films were smooth to the one or t wo atomic-layer level. The atomic-level smoothness of the films and th e ability to modify their microstructure makes them attractive for a n umber of fundamental and technological applications. (C) 1998 Elsevier Science S.A. All rights reserved.