Sh. Kim et al., THE EFFECTS OF PBTIO3 THIN TEMPLATE LAYER AND PT RUO2 HYBRID ELECTRODE ON THE FERROELECTRIC PROPERTIES OF SOL-GEL DERIVED PZT THIN-FILM/, Thin solid films, 325(1-2), 1998, pp. 72-78
Lead zirconate titanate, Pb(Zr0.52Ti0.48)O-3 (PZT) thin film with a th
in PbTiO3 template layer was successfully fabricated onto Pt/RuO2 hybr
id electrode by using a new alkoxide-alkanolamine sol-gel method, The
resulting film showed a well-developed dense grain structure with unif
orm distribution. It was observed that the use of Pt/RuO2? hybrid elec
trode helped reduce the amount of the Pb2Ru2O7-x second phase as well
as the leakage current by about three orders of magnitude. Typical P-E
hysteresis loops were observed even at the low applied voltage of 5 V
and the measured values of 2P(s), 2P(r) and 2E(c) were 93 mu C/cm(2),
48 mu C/cm(2) and 78 kV/cm, respectively. Polarization versus fatigue
characteristics showed little degradation up to 10(11) cycles. (C) 19
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