FERROELECTRIC THIN-FILMS FOR INTEGRATED PASSIVE COMPONENTS

Miniaturisation and integration of passive components play an importan t role in today's components market. It can be achieved by applying th in-film technologies for capacitors, resistors and inductors; high com ponent densities have been realised with 'Passive Only Networks'. The dielectric materials used for integrated thin-film capacitors ranging from Si3N4, Ta2O5, TiO2 to earth alkaline as well as lead perovskite l ayers are reviewed. The capacitor performances including temperature s tability, insulation resistance, breakdown fields and endurance are di scussed as a function of material composition.