TIME EVOLUTION OF 3-CRYSTAL X-RAY-SPECTRA DURING FLUORINATION OF A PTLAF3/SI STRUCTURE/

Authors
NEFEDOV AA SBITNEV SE FANCHENKO SS
Citation
Aa. Nefedov et al., TIME EVOLUTION OF 3-CRYSTAL X-RAY-SPECTRA DURING FLUORINATION OF A PTLAF3/SI STRUCTURE/, Technical physics letters, 24(7), 1998, pp. 554-555
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Technical physics letters → ACNP
ISSN journal
10637850
Volume
24
Issue
7
Year of publication
1998
Pages
554 - 555
Database
ISI
SICI code
1063-7850(1998)24:7<554:TEO3XD>2.0.ZU;2-N
Abstract
A qualitative change was observed in the three-crystal x-ray spectra d uring fluorination of a Pt/LaF3/Si structure. This may be attributed t o smoothing of the surface of the platinum film, most likely as a resu lt of the formation of platinum tetrafluoride which may undergo partia l volatilization or partial dissociation with the sublimation of plati num. (C) 1998 American Institute of Physics.