PHYSICAL-PROPERTIES OF MOLYBDENUM OXIDE THIN-FILMS FOR NO GAS-DETECTION

Authors
DIGIULIO M MANNO D MICOCCI G SERRA A TEPORE A
Citation
M. Digiulio et al., PHYSICAL-PROPERTIES OF MOLYBDENUM OXIDE THIN-FILMS FOR NO GAS-DETECTION, Physica status solidi. a, Applied research, 168(1), 1998, pp. 249-256
Citations number
18
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
168
Issue
1
Year of publication
1998
Pages
249 - 256
Database
ISI
SICI code
0031-8965(1998)168:1<249:POMOTF>2.0.ZU;2-8
Abstract
Molybdenum oxide thin films for gas sensing devices were deposited by rf reactive sputtering of a molybdenum target in Ar-O-2 atmosphere. Th en, a detailed structural, optical and electrical analysis was perform ed. The gas sensing features of deposited thin films were obtained by analysing the electrical response towards NO gas in the range 10 to 40 0 ppm. Electrical measurements showed that sputtered molybdenum oxide films are suitable for NO detection at operating temperatures of about 200 degrees C.