CONTROL OF ION-BEAMS BY SURFACE ION-ACOUSTIC-WAVE FIELDS

It is shown for the first time that surface ion-acoustic waves may be used for polishing, etching, and depositing coatings. The proposed met hod of treatment is simple and convenient since the apparatus required is not cumbersome and is easy to fabricate. Compared with conventiona l ion beams, the proposed method of surface treatment can deliver high particle currents at the surface, which should enhance the efficiency of the material treatment. In addition, the excited surface ion-acous tic waves are natural waves, which reduces the energy consumption. (C) 1998 American Institute of Physics. [S1063-7850(98)00202-X].