STRUCTURAL, MECHANICAL, AND FRICTIONAL-PROPERTIES OF TITANIUM NITRIDEFILMS EXPOSED TO CONTINUOUS ION-BEAM BOMBARDMENT

Authors
ROMANOV IG TSAREVA IN KRIVINA LA
Citation
Ig. Romanov et al., STRUCTURAL, MECHANICAL, AND FRICTIONAL-PROPERTIES OF TITANIUM NITRIDEFILMS EXPOSED TO CONTINUOUS ION-BEAM BOMBARDMENT, Technical physics letters, 24(2), 1998, pp. 110-111
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Technical physics letters → ACNP
ISSN journal
10637850
Volume
24
Issue
2
Year of publication
1998
Pages
110 - 111
Database
ISI
SICI code
1063-7850(1998)24:2<110:SMAFOT>2.0.ZU;2-1
Abstract
The influence of low-dose (10(14)-10(1)5 cm(-2)) ion bombardment on th e structural, mechanical, and frictional properties of titanium nitrid e films has been studied and results are presented. It is shown that a t these doses plastic deformation processes take place in the target m aterial, which change the degree of crystallinity. By selecting the bo mbardment conditions, the properties of TiN films can be varied fairly widely. (C) 1998 American Institute of Physics. CS 1063-7850(98)01202 -6].