Free-standing polycrystalline chemical vapor deposition diamond films
grown on a silicon wafer, with electrical behavior similar to values c
urrently mentioned in the literature, present microheterogeneity. A de
tailed analysis by micro Raman shows how the diamond and nondiamond ph
ases are distributed within the film and also the distribution of the
silicon related luminescence. This luminescence is discussed in terms
of two emitting centers close in energy. Absolute intensity of the dia
mond peak is not correlated with the good quality of the film as asses
sed by the Raman linewidth and ratio of this line to the nondiamond Ra
man lines. (C) 1998 American Institute of Physics. [S0021-8979(98)0881
6-1].