We report on the local order of n-Si39C61, a-Si40C24N36, and a-Si26C40
N34. The total structure factors and pair correlation functions obtain
ed by x-ray diffraction as well as the coordination numbers of the fir
st coordination sphere are presented. All materials exhibit a distinct
short range order. In the case of n-Si39C61, a stoichiometric amorpho
us SiC phase besides an amorphous carbon phase is formed. Also in the
case of a-Si40C24N36 and a-Si26C40N34 phase separation into two amorph
ous phases is observed. (C) 1998 American Institute of Physics. [S0021
-8979(98)10210-4].