Te. Itina et al., NUMERICAL STUDY OF THE ROLE OF A BACKGROUND GAS AND SYSTEM GEOMETRY IN PULSED-LASER DEPOSITION, Journal of applied physics, 83(11), 1998, pp. 6050-6054
The transport of laser ablated particles through a Maxwell-distributed
ambient gas is simulated by Monte Carlo method. Three system geometry
configurations frequently appearing in laser ablation experiments are
considered: plume tilting, use of an interacting gas jet, and deposit
ion on a substrate placed perpendicular to the laser-irradiated surfac
e. The influence of the ambient gas on the formation of film thickness
profiles and kinetic energy distributions of the deposited particles
is studied. The thermalization of the laser plume and the backscatteri
ng of the ablated particles due to collisions with the background gas
are investigated from two-dimensional film thickness distributions. (C
) 1998 American Institute of Physics. [S0021-8979(98)06311-7].