P. Mahalingam et Ds. Dandy, NONLINEAR STABILITY ANALYSIS OF THE GROWTH SURFACE DURING DIAMOND CHEMICAL-VAPOR-DEPOSITION, Journal of applied physics, 83(11), 1998, pp. 6061-6071
The morphological stability of the solid-gas interface under condition
s of diffusive transport of reactant species towards the surface durin
g the chemical vapor deposition process is analyzed using linear and n
onlinear perturbation theories. The Landau coefficient, which represen
ts the nonlinear growth rate, is calculated using the direct method of
undetermined coefficients. A dispersive relation is derived which rel
ates the effects of species diffusive transport towards the growing in
terface, surface diffusion, and geometrical factors with the stability
of perturbations on the interface. The resulting relation is applied
to the diamond chemical vapor deposition process. Linear and nonlinear
instability of the interface is obtained for diamond chemical vapor d
eposition conditions. Linear instability increases but the Landau coef
ficient becomes larger, indicating greater nonlinear stability as the
reactor pressure increases, although both linear and nonlinear analyse
s suggest more stability as the reactor temperature increases. However
, during typical diamond growth conditions, it is predicted that the d
iamond-gas interface is unstable to both infinitesimal and finite ampl
itude disturbances. (C) 1998 American Institute of Physics. [S0021-897
9(98)07611-7].