Tunability in the concentration and average dimensions of self-farming
semiconductor quantum dots (QDs) has been attained. Three of the appr
oaches examined here are: variations with temperature, group V partial
pressure and with substrate miscut angle. Thermally activated group I
II adatom mobilities result in larger diameters and lower concentratio
ns with increasing deposition temperatures. These variations are prese
nted for InGaAs/CaAs and AlInAs/AlGaAs, where striking differences wer
e seen. Tunability in the InGaAs/GaAs QD concentration was also obtain
ed in metalorganic chemical vapor deposition by varying the arsine flo
w. The latter gave widely varying concentrations and similar sizes. Su
bstrate orientation was found to also be a key factor in island nuclea
tion: Changes in vicinal orientation near (100) can be used to exploit
the preferential step edge nucleation at mono and multi-atomic steps,
so varying miscut angle (theta(m)) can be used to change island densi
ties and sizes. Anisotropies in island nucleation producing n-dot stri
ngs aligned with multiatomic step edges are observed for theta(m)great
er than or equal to 0.75 degrees and up to 2 degrees. Quantum mechanic
al coupling from such island strings result in non-Gaussian shapes in
the inhomogeneously broadened photoluminescence peaks. The effects of
some of the other morphological differences presented here on the lumi
nescence emission from QD ground states is discussed for InGaAs/GaAs Q
Ds. (C) 1998 American Institute of Physics.