TRANSPORT OF SPUTTERED ATOMS IN FACING TARGETS SPUTTERING GEOMETRY - A NUMERICAL-SIMULATION STUDY

The transport of sputtered Ag atoms in the facing targets sputtering g eometry studied by Monte Carlo simulation is presented. The atoms are ejected with a cosine distribution and undergo many collisions with th e background argon gas atoms. The collisions are simulated with a Born -Mayer interaction potential. The model predicts the flux of Ag atoms arriving at the substrate, their energy, and angular distribution. The se results have been compared with experimental results reported earli er. Similar computations have been extended to study the complex trans port of multicomponent Y, Ba, and Cu in oxygen gas during YBa2Cu3O7-x sputter deposition. (C) 1998 American Institute of Physics.