EVALUATION OF IMPRINT IN FULLY INTEGRATED (LA,SR)COO3 PB(NB,ZR,TI)O-3/(LA,SR)COO3 FERROELECTRIC CAPACITORS/

We have investigated the imprint characteristics of fully integrated f erroelectric lead zirconate titanate based capacitors. These capacitor s were fabricated using conducting perovskite La-Sr-Co-O electrodes. W e have specifically focused on the effect of several test and capacito r variables, including temperature, unipolar stress amplitude, number of cycles, and device area. Two different figures of merit, one based on coercive voltage changes and the other based on differences in pola rization values were used to quantify imprint. The imprint in our capa citors showed a small temperature dependence over the range that we ha ve studied. The unidirectional pulse voltage amplitude had a larger in fluence on the imprint. (C) 1998 American Institute of Physics.