CONCENTRATION OF NEUTRAL OXYGEN VACANCIES IN BURIED OXIDE FORMED BY IMPLANTATION OF OXYGEN

Authors
SEOL KS FUTAMI T OHKI Y
Citation
Ks. Seol et al., CONCENTRATION OF NEUTRAL OXYGEN VACANCIES IN BURIED OXIDE FORMED BY IMPLANTATION OF OXYGEN, Journal of applied physics, 83(4), 1998, pp. 2357-2359
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
83
Issue
4
Year of publication
1998
Pages
2357 - 2359
Database
ISI
SICI code
0021-8979(1998)83:4<2357:CONOVI>2.0.ZU;2-N
Abstract
Using synchrotron radiation as a photon source, photoluminescence spec tra were obtained for buried oxide formed by implantation of oxygen. F rom the spectra, the oxide was known to have relaxed and unrelaxed neu tral oxygen vacancies with respective concentrations of 1.4 x 10(20) a nd 1.0 x 10(17) cm(-3). (C) 1998 American Institute of Physics.