We report on a technique we have recently developed to fabricate very
high quality gates and gated structures on InAs/AlxGa1-xSb quantum wel
ls. The low thermal budget process leads to highly stable gates with e
xtremely low leakage currents. Both electron and hole concentrations c
an be changed over a wide range by the application of modest gate volt
ages. We obtain a dn/dV value of 5 x 10(11) cm(2)/V for electrons and
1.6 x 10(12) cm(2)/V for holes at 1.2 K. (C) 1998 American Institute o
f Physics.