STUDY OF CDTE ETCHING PROCESS IN ALCOHOLIC SOLUTIONS OF BROMINE

Changes in the structure and stoichiometry of the p-CdTe surface as a result of etching have been studied by high-resolution x-ray photoelec tron spectroscopy and the Rutherford backscattering method. Etching wi th bromine-methanol and bromine-butanol solutions is shown to enrich t he surface with elementary tellurium (Te-0). The etching process is an isotropic, in particular, the extent of enrichment with Te-0 is not th e same for A and B surfaces. Arguments are developed in favour of the heterophase nature of the etched surface. The presence of water in the etches leads to Te-0 oxidation in the course of etching. The mechanis m of etching is discussed based on the data obtained.