A RELIABLE CALIBRATION METHOD BASED ON ION CURRENT MEASUREMENT FOR ANELECTRON-BEAM TRANSITION-METAL DEPOSITION SOURCE

Authors
BULLOCK ET COYLE ST HEMBREE GG SCHEINFEIN MR
Citation
Et. Bullock et al., A RELIABLE CALIBRATION METHOD BASED ON ION CURRENT MEASUREMENT FOR ANELECTRON-BEAM TRANSITION-METAL DEPOSITION SOURCE, Review of scientific instruments, 69(7), 1998, pp. 2647-2650
Citations number
1
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
69
Issue
7
Year of publication
1998
Pages
2647 - 2650
Database
ISI
SICI code
0034-6748(1998)69:7<2647:ARCMBO>2.0.ZU;2-I
Abstract
A calibration scheme based on ion-current measurement has been impleme nted for an electron-beam transition metal deposition source. Repeatab le and practical means of positioning the source (tip), measuring the ion current, and determining the flux rate are given. Intrinsic variat ions in the structural parameters of the source and thermal effects wh ich can modify the observed deposition rate were examined and compensa ted for. A stable regime where ion-beam current is directly proportion al (+/-5%) to the growth rate has been determined. (C) 1998 American I nstitute of Physics. [S0034-6748 (98)03407-8]