ULTRATHIN DIBLOCK COPOLYMER TITANIUM LAMINATES - A TOOL FOR NANOLITHOGRAPHY/

Authors
SPATZ JP EIBECK P MOSSMER S MOLLER M HERZOG T ZIEMANN P
Citation
Jp. Spatz et al., ULTRATHIN DIBLOCK COPOLYMER TITANIUM LAMINATES - A TOOL FOR NANOLITHOGRAPHY/, Advanced materials, 10(11), 1998, pp. 849
Citations number
21
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
10
Issue
11
Year of publication
1998
Database
ISI
SICI code
0935-9648(1998)10:11<849:UDCTL->2.0.ZU;2-G
Abstract
A self-assembled diblock copolymer mask teamed with conventional ion e tching is one approach to nanometer patterning of surfaces. An ultrath in film of polystyrene-black-poly(2-vinylpyridine) on mica is shown to yield isolated, regularly arranged clusters of polystyrene surrounded by a thin Layer of poly(2-vinylpyridine) see Figure. Subsequent selec tive deposition of a metal film followed by etching results in surface patterning.