VACANCY DEFECTS IN (PB, LA)(ZR, TI)O-3 CAPACITORS OBSERVED BY POSITRON-ANNIHILATION

A study of vacancy-related defects in ferroelectric capacitors was per formed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr(0.2)Ti(0.8)O3) (PLZT) ferroelectric with La0.5Sr0.5 CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and t he effects of oxygen deficiency studied using structures grown with 76 0 and 1 x 10(-5) Torr oxygen. The VEPB depth profile showed an increas e in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation o f vacancy clusters in the LSCO top electrode, and V-Pb - V-O defects i n the PLZT layer, with increased oxygen deficiency is inferred. (C) 19 98 American Institute of Physics.