The anisotropy of electrical properties in ordered InxGa1-xP epitaxial
layers was studied. These samples were prepared by a low-pressure met
alorganic chemical vapor phase epitaxy technique at the growth tempera
ture of 640 degrees C. Resistivity measurements using a four-point-pro
be method have shown that samples with a low misfit value (0-1.5 x 10(
-3)) are electrically uniform. For samples with higher misfit the anis
otropy of resistivity markedly increases up to a maximum of 950. Compa
ring the results obtained from x-ray diffraction, low temperature phot
oluminescence, and atomic force microscopy experiments, pie have shown
that lattice mismatch can support the evolution and extension of the
ordering effect in the InxGa1-xP layers. (C) 1998 American Institute o
f Physics.