Planar arrays of 400 mu m diameter discharge devices fabricated on sil
icon with an anode-cathode spacing of 1 mm and device separations as s
mall as 0.8 mm are reported. Operated in parallel with a single ballas
t and specific power loadings in the discharge up to similar to 40 kW-
cm(-3), these arrays produce continuous emission from the atomic rare
gases and transient molecules such as the rare gas-halide excimer, xen
on-monoiodide (XeI).