Djd. Sullivan et al., PRECURSOR AND DIRECT ACTIVATED CHEMISORPTION OF CHLORINE MOLECULES ONTO SI(111) (7X7) AND SI(100) (2X1) SURFACES, Journal of physical chemistry, 97(46), 1993, pp. 12051-12060
The zero-coverage sticking/chemisorption probabilities (S-0) of a mono
energetic Cl-2 beam are measured on two faces of silicon: Si(111) (7x7
) and Si(100) (2x1). The initial sticking probabilities (S-0) are meas
ured as a function of the incident translational energy (E(i)), the su
rface temperature (T-s), and the angle between the incident beam and t
he surface normal (theta(i)). For Cl-2 chemisorption on Si(111) (7X7)
at 300 K, there is a moderate increase in S-0 from 54% at 0.038 eV to
75% at 0.66 eV. S-0 is nearly insensitive to the surface temperature f
or E(i) > 0.11 eV. At E(i) less than or equal to 0.11 eV there is a dr
op in S-0 when the T-s is elevated. These data indicate that the prima
ry mechanism for adsorption of Cl-2 onto Si(111) (7x7) is direct activ
ated chemisorption with an average barrier approximate to 0.04 eV and
that there is a precursor mediated chemisorption channel at low E(i).
Conversely, the initial sticking probability is a strong function of t
he incident molecular beam energy for Cl-2 onto Si(100) (2x1). For the
Si(100) (2x1) surface at 300 K, there is a decrease in S-0 from 58% a
t 0.038 eV to 42% at 0.045 eV and then a sharp increase to 72% at 0.16
eV. At the very lowest incident translational energy (0.038 eV), S-0
is a strong function of the surface temperature while for higher incid
ent translational energy (greater than or equal to 0.38 eV) S-0 is ind
ependent of the surface temperature. These data indicate that Cl-2 ads
orbs on Si(100) (2X1) via precursor-mediated chemisorption at low tran
slational energies and via direct activated chemisorption with an aver
age barrier of approximate to 0.055 +/- 0.010 eV at high translational
energies. The S-0 is independent of the incident angle of the molecul
ar beam for all incident energies on both surfaces.