The structure change of SrTiO3 (111) polar surfaces was studied as a f
unction of atmosphere, by atomic force microscopy, Auger electron spec
troscopy (AES) and X-ray photoelectron spectroscopy (XPS). The SrTiO3
(111) surfaces annealed in oxygen gas had a trench structure, while th
e surfaces annealed in argon gas formed large triangular terraces. The
surfaces annealed in air, i.e., in intermediate oxygen partial pressu
re. consisted of complicated self-similar triangles with different siz
es, forming a fractal shape called Sierpinski's gasket. The XPS analys
es indicated that surface oxygen states were different depending on th
e annealing atmosphere.