SOFT LITHOGRAPHY

Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabr ication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature s izes ranging from 30 nm to 100 mu m. Five techniques have been demonst rated: microcontact printing (mu CP), replica molding (REM), microtran sfer molding (mu TM), micromolding in capillaries (MIMIC), and solvent -assisted micromolding (SAMIM). In this chapter we discuss the procedu res for these techniques and their applications in micro- and nanofabr ication, surface chemistry, materials science, optics, MEMS, and micro electronics.