PEROVSKITE THIN-FILMS FOR HIGH-FREQUENCY CAPACITOR APPLICATIONS

Perovskite, ferroelectric and paraelectric, thin films exhibit outstan ding dielectric properties, even at high frequencies (>1 GHz). This fe ature makes films such as (Ba,Sr)TiO3 and Pb(Zr,Ti)O-3 ideally suited for a wide range of capacitor applications, particularly decoupling ca pacitors and tunable microwave capacitors; the latter application has been fueled by the recent explosion in wireless communications. The su ccessful implementation of these materials as high-frequency dielectri cs requires a detailed understanding of both their processing and mate rials properties.