Halogen adsorption on certain III-V semiconductor surfaces forms order
ed overlayers, while other surfaces etch. The microscopic mechanism un
derlying this behavior is investigated by comparing the adsorption of
I-2 on In- and As-terminated InAs(001) surfaces. On the In-terminated
surface, a well-ordered (1 x 1) structure forms and all of the iodine
attaches to In. The As-terminated surface becomes disordered, however,
and iodine attaches to both In and As. These observations can be expl
ained by assuming that iodine initially bonds to In atoms, whether the
y are in the first or the second layer.