PHOTOSTRUCTURAL TRANSFORMATIONS IN AMORPHOUS CHALKOGENIDE NANOLAYEREDFILMS PRODUCED BY THERMAL VAPOR-DEPOSITION

Photo- and thermoinduced changes of As2S3/SexTe1-x (0.1 < x < 0.5) mul tilayer structures were investigated by optical and electrical methods as well as by low angle X-ray diffraction (LAXD). It was shown that s amples with total thicknesses up to 0.7-0.8 mu m of 4-20 nm thick alte rnating layers with good periodicity, may be prepared by cyclic therma l vapour deposition. The structure of this multilayer may be changed b y thermal treatment or illumination with focused laser beam due to the interdiffusion. The corresponding photoinduced changes of optical par ameters (absorption, refraction) are useful for optical reading. (C) 1 998 Elsevier Science Ltd. All rights reserved.