We present a scanning acoustic force microscope (SAFM) for the study o
f surface acoustic wave (SAW) phenomena on the submicron lateral scale
. Until now, SAWs with in-plane oscillation components could only be s
tudied effectively via nonvanishing out-of-plane oscillation contribut
ions. By operating the microscope in lateral force mode, where both be
nding and torsion of the cantilever are detected, additional amplitude
-dependent signals are found, which are due to the interaction with pu
rely in-plane polarized surface oscillations. To demonstrate the capab
ilities of this type of SAFM, Love waves were studied on the surface o
f layers deposited on ST-cut quartz with SAW propagation perpendicular
to the crystal X-axis. The phase velocity of the wave as well as the
amplitude of a standing wave field was measured and compared to calcul
ated values. (C) 1998 American Institute of Physics.