MICROSCALE FRICTION INVESTIGATION OF POLYSILICON SURFACE USING SCANNING FORCE MICROSCOPY

Microscale phenomena between the surface of chemically vapour deposite d silicon films and a silicon nitride tip was investigated using Scann ing Force Microscopy. An analysis of friction forces for different sca n directions is presented. Ebr different applied forces, the friction forces were measured and consequently the friction coefficient was cal culated. We found that the average friction force linearly increases w ith the applied force and is reversible when unloading. Connection bet ween the surface roughness and the friction coefficient was experiment ally demonstrated.