We present in situ resistivity measurements of the high-temperature ph
ase behavior associated with oxygen variation of the ceramic system Nd
2-xCexCuO4-delta (NCCO) when annealed in ambient air. We observed a re
sistivity anomaly around 550 K in all deoxygenated samples prepared by
rapid cooling into liquid N2, which is smaller for higher Ce content.
We attribute this anomaly to oxygen in-diffusion, which is less with
increasing x. The implications of these results on the role of the oxy
gen vacancies to establish a metallic phase in NCCO are discussed.