RECOVERY OF THE FERROELECTRIC PROPERTIES OF HYDROGEN-DAMAGED IR PB(ZR,TI)O-3/IR CAPACITORS BY POST ANNEALING/

Authors
SAKODA T AOKI K FUKUDA Y
Citation
T. Sakoda et al., RECOVERY OF THE FERROELECTRIC PROPERTIES OF HYDROGEN-DAMAGED IR PB(ZR,TI)O-3/IR CAPACITORS BY POST ANNEALING/, JPN J A P 1, 37(5A), 1998, pp. 2565-2566
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
37
Issue
5A
Year of publication
1998
Pages
2565 - 2566
Database
ISI
SICI code
Abstract
In this paper, the recovery of the ferroelectric properties of Ir/Pb(Z r,Ti)O-3/Ir thin film capacitors damaged by annealing in a hydrogen am bient has been described. The ferroelectric properties of the capacito rs markedly degrade as a result of heat treatment in a hydrogen ambien t at 400 degrees C. These properties can be easily recovered to their initial state by post annealing using a rapid thermal annealing proces s in an oxygen ambient at 400 degrees C for 1 min.