3-COMPONENT NEGATIVE-TYPE PHOTORESIST BASED ON CALIX[4]RESORCINARENE,A CROSS-LINKER, AND A PHOTOACID GENERATOR

A negative-working photoresist based on calix[4]resorcinarene (C-4-RA) , 4,4'-methylenebis-[2,6-bis(hydroxymethyl)phenol] (MBHP) as a cross-l inker, and a photoacid generator diphenyliodonium 9,10-dimethoxyanthra cene-2-sulfonate (DIAS) has been developed. A clear transparent film w as obtained from a 25 wt % C-4-RA solution in 2-methoxyethanol. The ph otoresist consisting of C-4-RA (65 wt %), MBHP (25 wt %) and DIAS (10 wt %) showed a sensitivity of 4.3 mJ/cm(2) and a contrast of 2.9 when it was exposed to 365 nm light and postbaked at 120 degrees C for 3 mi n, followed by developing with a 0.1% aqueous tetramethylammonium hydr oxide solution at room temperature. The mechanistic study on the forma tion of images is also discussed.