Mp. Seah et al., XPS - BINDING-ENERGY CALIBRATION OF ELECTRON SPECTROMETERS 5 - REEVALUATION OF THE REFERENCE ENERGIES, Surface and interface analysis, 26(9), 1998, pp. 642-649
The binding energies of the calibration peaks for x-ray photoelectron
spectroscopy-Cu 2p(3/2), Ag 3d(5/2) and Au 4f(7/2)-have been reassesse
d based on the traceable data recorded in 1984 using unmonochromated x
-rays and an analyser resolution of 0.3 eV. The changes in those energ
ies, for different x-ray sources and analyser resolutions, have been c
alculated and the results compared with further data, This includes wo
rk with monochromatic Al x-rays recorded at high energy resolution, al
lowing the binding energies to be referred to a new zero value set at
the Fermi edge measured for Ag, A consistent set of data is presented
for the calibration and assessment of photoelectron spectrometers with
energy resolutions in the range 0.2-1.5 eV, when used with unmonochro
mated Al or Mg x-rays or monochromated Al x-rays. (C) 1998 John Whey &
Sons, Ltd.