HIGH-SPEED SCANNING OF PIEZO-PROBES FOR NANO-FABRICATION

Authors
CROFT D MCALLISTER D DEVASIA S
Citation
D. Croft et al., HIGH-SPEED SCANNING OF PIEZO-PROBES FOR NANO-FABRICATION, Journal of manufacturing science and engineering, 120(3), 1998, pp. 617-622
Citations number
31
Categorie Soggetti
Engineering, Mechanical","Engineering, Manufacturing
Journal title
Journal of manufacturing science and engineering → ACNP
ISSN journal
10871357
Volume
120
Issue
3
Year of publication
1998
Pages
617 - 622
Database
ISI
SICI code
1087-1357(1998)120:3<617:HSOPFN>2.0.ZU;2-A
Abstract
Low scanning speed of piezo-probes has been a fundamental limitation o f scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe . Faster scanning of piezo-probes is achieved here (experimental resul ts are presented) by using inversion of the piezo-dynamics-this approa ch uses a feedforward input voltage, applied to piezo-probe, to compen sate for piezo vibrations.