Bm. Nebeker et al., EVALUATION OF ITERATION METHODS USED WHEN MODELING SCATTERING FROM FEATURES ON SURFACES USING THE DISCRETE-DIPOLE APPROXIMATION, Journal of quantitative spectroscopy & radiative transfer, 60(3), 1998, pp. 493-500
We address modeling of light scattering from features on surfaces and
the numerical aspects associated with it. In this context, the feature
s represent micro-circuit components and/or particle contaminates on s
ilicon wafers. The discrete dipole approximation method is used to mod
el the scattering features, and various solution routines are presente
d. The quasi-minimal residual method is shown to be the most efficient
iteration method used considering the wide range of parameters invest
igated. (C) 1998 Elsevier Science Ltd. All rights reserved.