SYNTHESIS AND CHARACTERIZATION OF 2 NOVEL TITANIUM ISOPROPOXIDES STABILIZED WITH A CHELATING ALKOXIDE - THEIR USE IN THE LIQUID INJECTION MOCVD OF TITANIUM-DIOXIDE THIN-FILMS

The new precursors [Ti(OPri)(3)(OCH2CH2NMe2)] 1 and [Ti(OPri)(2)(OCH2C H2NMe2)(2)] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably wit h pseudooctahedral coordination at the metal centre. Thin films of TiO 2 have been deposited at 300-450 degrees C by liquid injection MOCVD u sing both 1 and 2. Analysis of the films by Auger electron spectroscop y failed to detect nitrogen although trace carbon was detected at leve ls of between 2.9 and 7.7%. The potential utility of these modified co mpounds as precursors to TiO2 is discussed.