INVESTIGATION OF THE ELECTRON-BEAM-INDUCED TRANSFORMATION OF CU-3 N-FILMS

Citation
N. Lesch et al., INVESTIGATION OF THE ELECTRON-BEAM-INDUCED TRANSFORMATION OF CU-3 N-FILMS, Fresenius' journal of analytical chemistry, 361(6-7), 1998, pp. 604-607
Citations number
8
Categorie Soggetti
Chemistry Analytical
ISSN journal
09370633
Volume
361
Issue
6-7
Year of publication
1998
Pages
604 - 607
Database
ISI
SICI code
0937-0633(1998)361:6-7<604:IOTETO>2.0.ZU;2-V
Abstract
Homogeneous films of metastable Cu3N were deposited on Si-<100> wafers at 90 degrees C by means of reactive magnetron sputtering ion plating . Under electron bombardment with a focused beam at high current (> 70 0 nA, 15 keV) these films transform into metallic Cu and N-2. The depl etion of N was measured quantitatively by EPMA. Structures with a late ral size of 2 mu m consisting of metallic copper were written into the Cu3N films. AFM surface scans revealed a vertical growth of the colum nar grains of the Cu3N film due to the electron bombardment.