INVESTIGATION OF ZNS THIN-FILMS ON SI(100) BY PHASE DETECTION IMAGINGAND YOUNGS MODULUS MICROSCOPY

In this study phase detection imaging (PDI) and Young's modulus micros copy (YMM) have been used for investigation of ZnS thin films deposite d on Si(100) substrates with successive ionic layer adsorption and rea ction (SILAR). The additional information obtained by these techniques allows a better interpretation of the topographic images in the case of the determination of the number of grains, their distribution and s urface coverage. Moreover, the comparison between PDI and YMM is discu ssed in order to shed more light on the contrast mechanism in phase de tection imaging.