CHARACTERIZATION OF MULTILAYERS BY MEANS OF EDXS IN THE ANALYTICAL TEM

Authors
THOMAS J RENNEKAMP R VANLOYEN L
Citation
J. Thomas et al., CHARACTERIZATION OF MULTILAYERS BY MEANS OF EDXS IN THE ANALYTICAL TEM, Fresenius' journal of analytical chemistry, 361(6-7), 1998, pp. 633-636
Citations number
6
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
361
Issue
6-7
Year of publication
1998
Pages
633 - 636
Database
ISI
SICI code
0937-0633(1998)361:6-7<633:COMBMO>2.0.ZU;2-F
Abstract
Referring to the characterization of nanoscale multilayers in cross se ction, the resolution limits of the EDXS method have been investigated . For that purpose EDXS line scan profiles of nanoscale Fe-Cr multilay ers have been calculated assuming an increased specimen thickness and different tilts between electron beam and layer interface. The resolut ion limit seems to be greater than 2 nm layer thickness for regular mu ltilayers. Experimentally a limit of 5 nm was reached.