EDX DEPTH PROFILING BY MEANS OF EFFECTIVE LAYERS

Authors
MYINT K BARFELS T KUHR JC FITTING HJ
Citation
K. Myint et al., EDX DEPTH PROFILING BY MEANS OF EFFECTIVE LAYERS, Fresenius' journal of analytical chemistry, 361(6-7), 1998, pp. 637-639
Citations number
4
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
361
Issue
6-7
Year of publication
1998
Pages
637 - 639
Database
ISI
SICI code
0937-0633(1998)361:6-7<637:EDPBMO>2.0.ZU;2-2
Abstract
A new approach is described for depth profiling in stratified multilay er samples by recording energy dependent characteristic x-ray EDX(E-0) curves in a scanning electron microscope. An effective layer techniqu e replaces the x-ray excitation function of the heterogeneous target b y an equivalent function of a homogeneous sample. First results of thi ckness determination are shown and compared to direct measurements of film thickness monitoring (FTM) and atomic force microscopy (AFM).