EFFECT OF THE BOTTOM ELECTRODE ON THE FORMATION OF THE PEROVSKITE PHASE IN LEAD-ZIRCONATE-TITANATE FILMS

Authors
AFANASEV VP KAPTELOV EY KRAMAR GP PRONIN IP
Citation
Vp. Afanasev et al., EFFECT OF THE BOTTOM ELECTRODE ON THE FORMATION OF THE PEROVSKITE PHASE IN LEAD-ZIRCONATE-TITANATE FILMS, Crystallography reports, 43(2), 1998, pp. 322-325
Citations number
8
Categorie Soggetti
Crystallography
Journal title
Crystallography reports → ACNP
ISSN journal
10637745
Volume
43
Issue
2
Year of publication
1998
Pages
322 - 325
Database
ISI
SICI code
1063-7745(1998)43:2<322:EOTBEO>2.0.ZU;2-E
Abstract
Microtopographic studies of the surface morphology are conducted out f or platinum films obtained under various deposition and heat treatment conditions. The effect of the microrelief of the bottom platinum elec trode on the formation of the perovskite phase in submicron lead-zirco nate-titanate (Pb-Zr-Ti) films is studied. It is shown that the use of a smooth platinum sublayer allows one to obtain single-phase Pk-Zr-Ti films with a thickness less than 100 nm. The properties of Pb-Zr-Ti f ilms as elements of capacitor structures with platinum electrodes are studied.