EXPERIMENTAL X-RAY STUDY OF THE CORRELATION OF THE SURFACE PROFILES OF A FILM AND A SUBSTRATE

The possibilities provided by the method of X-ray scattering at the gr azing incidence for the studies of thin-film coatings are considered, The methods of measuring and processing experimental data and providin g the quantitative characterization of the correlation between the sur face profiles of a film and a substrate and the determination of the p arameters of additional roughness Termed in the process of film deposi tion are discussed. The experimental study of the roughness of BaF2 fi lms deposited onto quartz substrates are described. The data obtained are compared with the widely used model of film growth.